Advanced Thin Film Solutions
 
 
 
                               
 
 SQC-300 Series Deposition Controllers
                               
                               
   
Features
 
High resolution: ± 0.03Hz at 10 readings/sec
2 or 4 channels
¼ VGA color LCD display
Sequential (SQC-310) or Co-deposition (SQC-310C) models
RS232 and USB standard
Ethernet optional
Windows® software included
Low Cost
 
 
Additional Information
Data sheet / Sales Brochure (PDF)
 
Instruction Manual (PDF)
Comm Software (EXE)
                               
  The SQC-300 series of deposition controllers are easy-to-use instruments that combine the features and specifications of instruments costing much more.   Choice of sequential (SQC-310) or co-deposition (SQC-310C) models and ample I/O provide application flexibility for OEMs and end-users. Windows Comm Software for setup and data logging is included.
                               
 
Configurations, Options, and Accessories
   
Controller  
  Sequential Deposition, 2 or 4 channels SQC-310
  Codeposition, 4 channels only SQC-310C
Number of Channels  
 

2 Channels (2 QCM sensors, 2 outputs, 8 digital I/O)
Standard on SQC-310, not available on the SQC-310C

 2
  4 Channels (4 QCM sensors, 4 outputs, 16 digital I/O) 4
Interface  
  Standard - RS-232 & USB R
  Optional - RS-232 & Ethernet E
   
Accessories & options, when ordered separately  
  Handheld Remote Power Control, with 25ft (7.6m) coiled cable 900-017
  Rack Adapter 3U - mounts one SQC-310 in 19" rack 900-007
  Rack Adapter 3U - mounts SQC-310 to another 3U instrument 900-016
  Ethernet interface 900-026
     
Example of controller model number:
  Sequential deposition controller with 4 channel option,
and Ethernet option		 SQC-310-4-E
     
Example of a complete system:  consists of a controller, at least one sensor, one feedthrough, and one sensor kit for each sensor.  A sensor kit contains a standard oscillator, a 10-pack of crystals, and the cables required to connect everything together. 
  SQC-310 Controller, 4 channels, RS232 & Ethernet SQC-310-4-E
  Feedthrough, 1 inch bolt, one electrical and two cooling lines 930-000
  Single standard sensor 932-000
  Sensor kit, includes one 900-010 oscillator, one 934-000 10-pack of gold crystals, one 902-011 6" (150mm) BNC cable, one 902-012 10ft (3m) BNC cable, and one 902-014 30" (0.7m) vacuum cable. 934-003
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
Specifications
     

Measurement

QCM Sensor Inputs

2 standard, +2 optional (4 total)

Frequency Range

4 to 6 MHz

Frequency Resolution

± 0.03 Hz at 0.10 sec measurement period

Frequency Stability

± 2 ppm total, over 0 to 50 oC

Measurement/Update Rate

1 to 10 Hz

Rate Display Resolution

0.01 Å/sec

Thickness Display Resolution

0.001 kÅ

Control

Source (or Recorder) Outputs

2 standard, +2 optional (4 total)

Output Signal

± 0 to 10 VDC, 15 bit resolution

Digital Inputs/Outputs

8/8 standard, +8/8 optional (16/16 total)

Inputs

5 VDC non-isolated

Output Relays

SPST Form 1A, 30V, 2A max

Co-Deposition

Optional

Interface(s)

RS-232 and USB standard, Ethernet optional (replaces USB)

Remote / Manual Power Control

Optional

Display

Type

¼ VGA (320x240) active matrix color LCD
5.8" (147mm) diagonal

Graphs

3: rate, rate deviation, output power

Full Screen Numeric Display

Yes

General

Power

100-240 VAC, 50/60 Hz, 25 W

Compliance

CE

Windows Software

Included

Housing / Mounting

½-rack cabinet, 5¼" high (3U)

 

Program Features / Functions

  

Materials

material, density, Z-factor

Films

PID terms, sensors, tooling, output, source pocket, max power, slew rate, crystal quality, crystal stability, crystal fail mode, ramp time, soak power, feed ramp time, feed power, feed time, idle ramp time, idle power, shutter delay time, shutter delay capture, control error, control error setting, rate sampling, sample time, hold time, more....

Layers

initial rate, final thickness, time setpoint, thickness limit, start mode, rate ramps, rate ramp start, rate ramp time, new rate, more....

Processes

100 processes, 1000 layers, 50 films, 4 co-deposited films

Inputs (assign to any input)

start process, abort process, restart layer, start next layer, stop layer, hold deposit phase, force final thickness, zero thickness, source, pocket home, more....

Outputs  (assign to any relay)

source shutter, source pocket, sensor shutter, dual sensor shutter, sensor fail, all sensors fail, process active, process stopped, manual mode, precondition phase, deposit phase, soak/hold phase, final thickness, thickness setpoint, time setpoint, max power, more....

System

period, filter, system tooling, crystal tooling, pocket output, pocket delay, simulate, min/max frequency, full scale, output function, rate alarm Hi/Lo, password, more....

 
 
 
 
                               
 
SQC-122 & SQC-222 and Equivalent SQC-300 Series Models
SQC-300 Series Controllers are exact replacements for Sigma's SQC-122c and SQC-222 controllers.  The specific configurations listed below are equivalent drop-in replacements for these older units.  These units have the same size display and housing, are plug-compatible with existing cables and accessories, and are software-compatible with process recipes and control interfacing you might already have. 
   SQC-122c
   SQC-310-2-R-D
SQC-222 2-channel
Not Available
SQC-222 4-channel
SQC-310C-4-R-C
 
 
                               
                               
                               
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