Advanced Thin Film Solutions
 
 
 
                                     
 
 Sigma SQM-160 Deposition Rate/Thickness Monitor
                                     
                                     
 
Features
 
2 QCM channels standard, 6 optional
 
2 analog outputs for rate/thickness recording
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REPRESENTATIVES
Display rate, thickness, frequency, or mass
High resolution option provides
  ±0.03Hz at 10 readings/sec
RS232 standard, USB or Ethernet optional
Windows setup and datalogging software included
2 ppm low temperature coefficient oscillator
     
Additional Information
Data sheet / Sales Brochure (PDF)
 
Instruction Manual (PDF)
                                     
  The Sigma SQM-160 is a low-cost, easy-to-use instrument for monitoring deposition rate and thickness - ideal for single or multi-film processes where manual control is adequate.        
                                     
                                     
  Specifications                    
 

QCM Sensor Inputs

standard: 2
optional: 6

Frequency Range

4 to 6 MHz

Frequency Resolution

standard: ± 0.12 Hz at 4 readings/sec
optional: ± 0.03 Hz at 10 readings/sec

Frequency Stability

± 2 ppm total, over 0 to 50 oC

Measurement Period

0.10 to 2 sec

Measurement Filter

1 to 20 readings

Stored Films

9

Analog Outputs

two 0 to 10 VDC, rate & thickness

Digital Inputs/Outputs

two inputs, four relay outputs

Digital Interface

standard: RS-232
optional: USB , or Ethernet

Power

100-120/200-240 VAC, 50/60 Hz, 20 W

CE Compliance

Class 1 Equipment, 73/72/EEC LVD, 89/336/EEC ECD

Housing / Mounting

½-rack cabinet, 3½" high, 89x213x197mm (3½" x 8½" x 7¾")

Weight

2.7 Kg (6 lbs)

Windows Software (included)

Provides remote setup and operation, datalogging functions
 
 
 
 
 
 
 
 
 
 
 
                                     
  Ordering Information                    
 
  part number / ordering code
SQM-160 QCM Monitor
SQM-160 - __ - __ - __
     Resolution  
         standard resolution:  0.12Hz at 4 readings/sec                     S
         optional high resolution:  0.03Hz at 10 readings/sec                     H
     Number of QCM Channels  
         standard:  two channels                            2
         optional:  six channels                            6
     Interface  
         standard:  RS-232                                   R
         optional:  USB                                   U
         optional:  Ethernet                                   E
   

Accessories

  

     19" Rack Mount for one SQM-160

900-008

     19" Rack Mount for two SQM-160

900-014

     4-Channel Option Card:  converts a 2-channel SQM-160 to 6-channels

502-062

     High Resolution Option:  converts a standard resolution SQM-160 to high resolution
          (note - this option must be factory installed)

900-042

     USB Option Card

900-040

     Ethernet Option Card

900-041

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
   
 
Typical SQM-160 System Configuration  
A complete system consists of a monitor, feedthrough, sensor, and sensor kit.  A sensor kit contains a standard oscillator, a 10-pack of crystals, and the cables required to connect everything together.  An example of a basic typical system might include the following:  
1.  Two-Channel Monitor, with standard resolution and RS-232 interface
SQM-160-S-2-R
2.  Feedthrough, 1 inch bolt, one electrical and two cooling lines 3/16"
930-000
3.  Single standard sensor, with 1/8" cooling lines
932-000
4.  Sensor kit, includes one 900-010 oscillator, one 934-000 10-pack of gold crystals, one 902-011 6inch ( 150mm) BNC cable, one 902-012 10ft (3m) BNC cable, and one 902-014 30" (0.7m) vacuum cable.
934-003
 
 
 
 
 
 
 
   
                                     
         
                                     
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